Inversion of Electrical and Geometrical Parameters of a Structure with a Rough Interface

This study presents the characterization of rough surfaces, based on the small perturbation method (SPM) and the small slopes approximation model (SSA). The inversion problem is then formulated as a cost function optimization problem and is solved using a global optimization algorithm known as simulated annealing (SA). The examples of analysis and inversion shows that this inverse method is feasible and efficient using the algorithm of simulated annealing.