FEM Simulation and Performance Evaluation of MEMS Pressure Sensor Based on Capacitive Effect Using Molybdenum and Tungsten

Microsystems have experienced a great deal of development during the last years leading to more complex systems for sensing, analyzing, and actuating. It combines and integrates miniaturized sensors, actuators and electronics in a single device for various applications in different fields [1-2]. One of the major applications of these devices is the Micro Electromechanical System (MEMS) pressure sensors for tire pressure measurements [3-4]. In addition, these integrated devices have been used in airbag deployment in automobiles since the nineties of the last century [3]. There are several types of pressure sensors, the most common MEMS pressure sensors categorizes are the piezoresistive and capacitive effect one. Recently, (MEMS) capacitive pressure sensor gains more advantage over micromachined piezoresistive pressure sensor due to its high sensitivity, low power consumption, IC compatibility, better thermal stress etc. [5].