Finite element modeling and simulation of a microstructure silicon beam resonant

Mohamed Shaglouf; ElJaroshi Diryak; Ahmed Abugalia

Finite element modeling and simulation of a microstructure silicon beam resonant

Authors

Mohamed Shaglouf

Department of Electrical and Electronics, College of Engineering, Sirte University, Libya

ElJaroshi Diryak

Department of Electrical and Electronics, College of Engineering, Sirte University, Libya

Ahmed Abugalia

Department of Electrical and Electronics, College of Engineering, Sirte University, Libya

DOI: https://doi.org/10.21467/proceedings.4.40

Synopsis

This paper establishes the Finite Element Method (FEM) model of a practical silicon beam resonator attached to a diaphragm used for measuring pressure. In this paper presents two location error models. Analyze, calculate, and investigate the relationship between the basic natural frequency of the beam resonator and the measured pressure for two error models are discussed.