INVESTIGATIONS AND CHARACTERISTICS OF HEAT TRANSFER IN DIFFERENT MICROSTRUCTURE DEVICES

In this research work design of a micro heater has been done in multiphysics environment. As per the current issues of COVID-19 there is a huge demand of new chemical or bio sensors especially in the field of public healthcare and environment. The most important component of a chemical sensor is a Micro heater. It plays a vital role and treated as a key component due to its unique features. Even by using micro heater semiconductor gas sensor operations can be enhanced by maintaining uniform micro heater temperature. To achieve maximum sensitivity micro heater should be placed on membrane and need to maintain uniform temperature. The major challenge is choosing a perfect suited membrane material as well as acceptable micro heater geometry. Since heater reliability is much important for this kind of design and analysis so it is possible by minimizing hot spot of heater. In MEMS technology the main cause of power consumption is thermal loss. Using micromachining of the silicon substrate as per the requirement geometries can be obtained but the major factor is to give most attention on reduction of dimensions of that particular device or structure to avoid more power consumption. Finally, this study will help to understand the concept of MEMS, Multiphysics environment, importance and huge applications of micro heater.